|
General
|
Detector
Dynamic range |
CCD line array detector ELIAS I: 1,024 pixels; ELIAS II/III: 2,048 pixels
16 Bit-AD conversion, effectively approx. 33,000:1 |
| |
Signal-to-noise ratio |
at level 40,000 better 10,000 / 40 dB |
| |
Exposure time min |
ELIAS I: 18 ms ELIAS II/III: 2 ms |
| |
Integrated mechanical shutter |
| |
Coupling via fibre, except for ELIAS-VUV (mirror optics) |
| |
Wavelength calibration by integrated mercury lamp (253.652 nm) |
| |
Absolute accuracy when calibrating with the internal HG lamp better than ±5 pm |
| |
Rel. pixel dispersion error depending on the wavelength, for 193 nm double pass 0.2 fm |
| |
Industrial PC with Windows |
| |
Software |
Sophi, LabView driver optional |
| |
Dimensions ELIAS Standard (L x B x H) |
(1,400 x 500 x 1300) mm |
