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ELIAS

Highest-resolution commercial spectrometer series, for the characterization of lasers in the microlithography.

ELIAS

Highest spectral resolution Intensity dynamics of up to 4 orders
High imaging quality
Industrial use

General	Detector Dynamic range	CCD line array detector ELIAS I: 1,024 pixels; ELIAS II/III: 2,048 pixels 16 Bit-AD conversion, effectively approx. 33,000:1
	Signal-to-noise ratio	at level 40,000 better 10,000 / 40 dB
	Exposure time min	ELIAS I: 18 ms ELIAS II/III: 2 ms
	Integrated mechanical shutter
	Coupling via fibre, except for ELIAS-VUV (mirror optics)
	Wavelength calibration by integrated mercury lamp (253.652 nm)
	Absolute accuracy when calibrating with the internal HG lamp better than ±5 pm
	Rel. pixel dispersion error depending on the wavelength, for 193 nm double pass 0.2 fm
	Industrial PC with Windows
	Software	Sophi, LabView driver optional
	Dimensions ELIAS Standard (L x B x H)	(1,400 x 500 x 1300) mm

Wavelength
(nm)

ELIAS-LD

ELIAS I-standard, VUV,
Portable

ELIAS II

ELIAS III

Pass		double	single	double	single	double	quadruple
Simultaneous	157	49	152	14	45	-	-
inspections	193	52	170	15	48	16.4	8.4
range (pm)	248	71	227	20	64	22.5	11.5
	266	92	275	25	73	29.7	15
	532	185	551	49	146	59.4	29.9
	766	293	846	82	244	92.5	47.5
	1064	626	-	98	292	200	101
Resolution	157	0.1	0.31	0.083	0.254	-	-
Narrowest	193	0.11	0.34	0.086	0.283	0.060	0.022
spectrally	248	0.15	0.46	0.117	0.376	0.082	0.032
resolvable	266	0.19	0.55	0.147	0.428	0.112	0.042
line	532	0.37	1.1	0.294	0.856	0.225	0.084
FWHM (pm)	766	0.59	1.7	0.482	1.4	0.339	0.130
	1064	1.25	-	0.588	1.711	0.450	0.165

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